Tantalum pentoxide on a fused quartz substrate platform for advanced photonic integrated circuits

Abstract

Integrated photonics is a growing field in optics and microelectronics. In particular, tantalum pentoxide (Ta2O5) is a promising material for advancing integrated photonic circuits. Ta2O5 exhibits favorable characteristics, such as a high refractive index, wide transparency window, and low autofluorescence. Therefore, this study develops low-loss Ta2O5 waveguidebased microring resonators optimized for telecom band operations on fused quartz substrates. The experiments demonstrated the excellent optical properties of Ta2O5 for fabricating highperformance photonic structures. Moreover, we explored integrating diamond-inverted nanocones with Ta2O5 waveguides for single-photon emission. The findings provide insights into using Ta2O5 to develop single-photon emitters integrated into photonic circuits.