Investigation of fundamental photonic devices and effect of post-cleaning using potassium hydroxide on lithium niobate chip

Authors
Kwon, KiwonShin, HeedeukJang, Hyeong-soonHeo, HyungjunJung, Hojoong
Issue Date
2025-01
Publisher
한국물리학회
Citation
Journal of the Korean Physical Society, v.86, no.2, pp.85 - 90
Abstract
This study demonstrates the fabrication and optical characterization of lithium niobate photonic devices including waveguides, beam splitters, and microring resonators on a thin-film lithium niobate platform. Through precise fabrication techniques and KOH post-cleaning following Ar-based etching, we achieved effective optical performance across key parameters such as transmission loss, splitting ratios, and Q-factors. These results show the potential of lithium niobate in advanced photonic applications, paving the way for its use in integrated on-chip photonics.
Keywords
Lithium niobate; Photonics; Microresonator
ISSN
0374-4884
URI
https://pubs.kist.re.kr/handle/201004/151497
DOI
10.1007/s40042-024-01250-0
Appears in Collections:
KIST Article > 2024
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