DSpace at KISTKIST PublicationConference Paper

The growth and characteristics of wet thermal oxidation film for SOI fabrication

Title
The growth and characteristics of wet thermal oxidation film for SOI fabrication
Authors
김형권; 변영태; 김선호; 한상국; 옥성해
Keywords
SOI; 열산화막 성장; 습식 열산화로; 식각 마스크; 포토리소그라피
Issue Date
2003-02
Publisher
한국광학회 제 14 회 정기총회 및 2003 년도 동계학술발표회
Citation
, 172-173
URI
https://pubs.kist.re.kr/handle/201004/15243
Appears in Collections:
KIST Publication > Conference Paper
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