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Off-axis sputtering 방식을 이용한 산화막 결정 방향 제어 기술

Author

김형준; 최리노; 백대윤; 김승환

Assignee

한국과학기술연구원

Regitration Date

2025-08-01

Registration No.

10-2842982

Application Date

2022-12-14

Application No.

10-2022-0174710

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/152948

Appears in Collections:

KIST Patent > 2022

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