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Application of nano-cluster ion beam to surface smoothening, etching, and ultra-shallow junction formation.

Title
Application of nano-cluster ion beam to surface smoothening, etching, and ultra-shallow junction formation.
Authors
송재훈; 최원국
Keywords
Gas cluster
Issue Date
2003-02
Publisher
Journal of the Korean Physical Society
Citation
v. 42, S235-S239.
URI
https://pubs.kist.re.kr/handle/201004/15298
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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