에피택시 강유전 HfO2 게이트를 이용한 FeFET

Author
백승협최형진허성훈장지수강종윤송현철김성근최지원김진상윤정호
Assignee
한국과학기술연구원
Regitration Date
2025-09-16
Registration No.
10-2862067
Application Date
2023-02-27
Application No.
10-2023-0025975
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/153192
Appears in Collections:
KIST Patent > 2023
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