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Coordination polyhedron and chemical vapor deposition of Cu(hfacac)₂(t-BuNH₂)

Title
Coordination polyhedron and chemical vapor deposition of Cu(hfacac)₂(t-BuNH₂)
Authors
우경자; 백호정; 이완인
Keywords
coordination polyhedron; Cu precursor; MOCVD; deposition rate
Issue Date
2003-10
Publisher
Inorganic Chemistry
Citation
VOL 42, NO 20, 6484-6488
URI
https://pubs.kist.re.kr/handle/201004/15359
ISSN
0020-1669
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KIST Publication > Article
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