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Effect of glycine adsorption on polishing of silicon nitride in chemical mechanical planarzation process

Title: Effect of glycine adsorption on polishing of silicon nitride in chemical mechanical planarzation process

Authors: 김태은; 임건자; 이종호; 김주선; 이해원; 임대순

Keywords: chemical mechanical planarization

Issue Date: 2003-01

Publisher: 한국세라믹학회지 (Journal of the Korean Ceramic Society)

Citation: VOL 40, NO 1, 77-80

URI: https://pubs.kist.re.kr/handle/201004/15399

ISSN: 1229-7801

Appears in Collections:: KIST Publication > Article

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