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원자층증착법을 이용한 귀금속박막의 영역선택적 증착 방법

Author

김한; 장지수; 허성훈; 송현철; 백승협; 최지원; 김진상; 강종윤; 김성근

Assignee

한국과학기술연구원

Regitration Date

2026-04-22

Registration No.

10-2957923

Application Date

2023-10-19

Application No.

10-2023-0140605

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/154617

Appears in Collections:

KIST Patent > 2023

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