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Optical MEMS-MEMS 기술의 센서 응용 ( 비냉각형 적외선 이미지 소자를 중심으로 )

Title
Optical MEMS-MEMS 기술의 센서 응용 ( 비냉각형 적외선 이미지 소자를 중심으로 )
Authors
문성욱
Keywords
MEMS
Issue Date
2002-08
Publisher
Semiconductor Monthly
Citation
VOL 174, 40-57
URI
https://pubs.kist.re.kr/handle/201004/15479
Appears in Collections:
KIST Publication > ETC
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