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Abatement of CF₄with dielectric barrier discharges at atmospheric pressure

Title
Abatement of CF₄with dielectric barrier discharges at atmospheric pressure
Authors
이광식; 여영구; 최재욱; 이화웅; 송형근; 나병기
Keywords
PFC; 배리어 방전; Abatement; CF4; dielectric barrier discharge
Issue Date
2002-04
Publisher
화학공학의 이론과 응용 (2002 년 화공학회 춘계학술발표회 ); Theories and Applications of Ch
Citation
VOL 8, NO 1, 1597-1600
URI
https://pubs.kist.re.kr/handle/201004/15854
Appears in Collections:
KIST Publication > Conference Paper
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