Preparation of diffuser type micropump using screen-printed PZT-PCW thick films

Title
Preparation of diffuser type micropump using screen-printed PZT-PCW thick films
Authors
김용범김형준Chae Il Cheon최두진김태송
Keywords
PZT
Issue Date
2002-11
Publisher
Integrated Ferroelectrics
Citation
VOL 50, 61-70
URI
https://pubs.kist.re.kr/handle/201004/15978
ISSN
1058-4587
Appears in Collections:
KIST Publication > Article
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