DSpace at KIST: Fabrication of a high-aspect-ratio structure (HARS) and a 3D feed-horn-shaped structure array for a 3D MEMS antenna array by using a novel UV lithography apparatus

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Fabrication of a high-aspect-ratio structure (HARS) and a 3D feed-horn-shaped structure array for a 3D MEMS antenna array by using a novel UV lithography apparatus

Title: Fabrication of a high-aspect-ratio structure (HARS) and a 3D feed-horn-shaped structure array for a 3D MEMS antenna array by using a novel UV lithography apparatus

Authors: 박종연; 김근태; 신현준; 문성욱; 박정호

Keywords: 3D MEMS; uv-lithography; high aspect ratio structure; HARS

Issue Date: 2002-10

Publisher: Journal of the Korean Physical Society

Citation: VOL 41, NO 4, 552-556

URI: https://pubs.kist.re.kr/handle/201004/16105

ISSN: 0374-4884

Appears in Collections:: KIST Publication > Article

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