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Abnormal growth and electrode characteristics of LiCoO₂ thin films deposited by radio frequency magnetron sputtering

Title: Abnormal growth and electrode characteristics of LiCoO₂ thin films deposited by radio frequency magnetron sputtering

Authors: 박호영; 임영창; 남상철; 윤영수; 조원일; 조병원; 윤경석; 이성래

Keywords: RF magnetron sputtering; LiCoO₂ thin film; thin rilm battery

Issue Date: 2001-04

Publisher: 한국전기화학회 학술발표회 초록집

Citation: , 78-78

URI: https://pubs.kist.re.kr/handle/201004/16533

Appears in Collections:: KIST Publication > Conference Paper

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