Analysis of multi-layer VOx thin film for uncooled IR detectors
- Analysis of multi-layer VOx thin film for uncooled IR detectors
- 박철우; 문성욱
- Issue Date
- Journal of the Korean Physical Society
- VOL 39, S138-S140.
- In this paper, we analyzed multi VOx thin lms to use as IR absorbing layer of uncooled IR
devices. We used the new structure to fabricate VOx thin lm that has improved IR absorbing
characteristics. We deposited multi VOx thin lms on SiNx by reactive RF magnetron sputtering
method with di erent conditions. We changed the thickness of V and V2O5 thin lms and O2/Ar
gas ratio. With this method, we could fabricate multi VOx thin lms that have improved IR
absorbing characteristics. As the result of this, we obtained that TCR(Temperature Coe cient of
Resistance) value of multi layer VOx thin lms was about -2.0 %/K and resistivity was 1
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