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Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition

Title: Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition

Authors: 김도근; 성태연; 백영준

Keywords: TiN/AlN multilayers; Superlattices; Oxidation; Auger electron spectroscopy (AES); X-Ray diffraction

Issue Date: 2001-10

Publisher: Thin solid films

Citation: VOL 397, NO 1-2, 203-207

URI: https://pubs.kist.re.kr/handle/201004/16854

ISSN: 0040-6090

Appears in Collections:: KIST Publication > Article

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