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Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃

Title
Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃
Authors
심현상; 김동준; 김용태; 전형탁; 박영균; 김성일
Keywords
cyclic exposure
Issue Date
2000-06
Publisher
The International Conference on Electrical Engineering 2000
Citation
, 774-777
URI
https://pubs.kist.re.kr/handle/201004/17162
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KIST Publication > Conference Paper
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