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A prediction method of temperature distribution on the wafer in a rapid thermal process system with multipoint sensing

Title
A prediction method of temperature distribution on the wafer in a rapid thermal process system with multipoint sensing
Authors
심영렬; 이석주; 민병조; 조영조; 김학배
Keywords
rapid thermal process; thermal modeling; tempertaure estimation; chamber geometry; run-by-run control
Issue Date
2000-02
Publisher
전기학회논문지 D; Transactions of the Korean Institute of Electrical Engneers
Citation
VOL 49, NO 2, 62-67
URI
https://pubs.kist.re.kr/handle/201004/17390
ISSN
1229-6287
Appears in Collections:
KIST Publication > Article
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