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Plasma source ion implantations for shallow p+/n junction

Title
Plasma source ion implantations for shallow p+/n junction
Authors
조정희; 한승희; 이연희; 김옥경; 김곤호; 김영우; 임현의; 서무진
Keywords
plasma source ion implantation; shallow p+/n junction; electrical characteristics
Issue Date
2000-02
Publisher
제18회 한국진공학회 학술발표회
Citation
, 180-180
URI
https://pubs.kist.re.kr/handle/201004/17404
Appears in Collections:
KIST Publication > Conference Paper
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