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Sol-gel processing for epitaxial growth of ZrO2 thin films on Si(100) wafers

Title
Sol-gel processing for epitaxial growth of ZrO2 thin films on Si(100) wafers
Authors
배승영; 최현석; 최세영; 오영제
Keywords
sol-gel; epitaxial growth; ZrO2 thin film
Issue Date
2000-11
Publisher
Ceramics international
Citation
VOL 26, NO 2, 213-214
URI
https://pubs.kist.re.kr/handle/201004/17458
ISSN
0272-8842
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KIST Publication > Article
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