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Asymmetric pulsed dc sputtered AIN thin film for FBAR application

Title
Asymmetric pulsed dc sputtered AIN thin film for FBAR application
Authors
김주형; 이시형; 이전국; 안진호
Keywords
asymmetric pulsed dc
Issue Date
2000-11
Publisher
강유전체 및 FRAM 기술 Workshop
Citation
, 160-164
URI
https://pubs.kist.re.kr/handle/201004/17506
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KIST Publication > Conference Paper
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