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Results 1-3 of 3 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
1995-01
New concept for amorphous diffusion barrier: Ion beam modification of metal/semiconductor interface.
Kim Yong Tae
;
S. K. Kwak
;
C. S. Kwon
;
D. J. Kim
;
C. W. Lee
;
I. H. Choi
;
Min Suk-Ki
1993-01
Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films.
Kim Yong Tae
;
C. S. Kwon
;
I. H. Choi
;
C. W. Lee
;
Min Suk-Ki
1994-01
Nitrogen implanted tungsten thin films for Cu diffusion barrier.
Kim Yong Tae
;
D. J. Kim
;
C. S. Kwon
;
I. H. Choi
;
Min Suk-Ki
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Kim Yong Tae
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Min Suk-Ki
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C. W. Lee
2
D. J. Kim
1
S. K. Kwak
-Date issued
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1995
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1994
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1993
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