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Design of self-ion assisted beam source (SIAB) based on electron focusing with concentric symmetrical electric field and Cu thin film growth by SIAB

Title: Design of self-ion assisted beam source (SIAB) based on electron focusing with concentric symmetrical electric field and Cu thin film growth by SIAB

Authors: 송재훈; 김기환; 이충만; 최성창; 송종한; 정형진; 최원국

Keywords: self-ion assisted beam source; unvala scheme; electrostatic focusing; Cu thin film

Issue Date: 1999-05

Publisher: 한국진공학회지; Journal of the Korean Vacuum Society

Citation: VOL 8, NO 2, 121-126

URI: https://pubs.kist.re.kr/handle/201004/18009

ISSN: 1225-8822

Appears in Collections:: KIST Publication > Article

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