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Characterization of the nitrided GaAs thin layers after rapid thermal annealing by using raman scattering.

Title
Characterization of the nitrided GaAs thin layers after rapid thermal annealing by using raman scattering.
Authors
고의관; 박용주; 김은규; 조성호
Keywords
Nitridation
Issue Date
1998-01
Publisher
Digest of Papers Microprocesses and Nanotechnology '98 : 1998 International Microprocesses and Nanot
Citation
, 210-211
URI
https://pubs.kist.re.kr/handle/201004/19170
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KIST Publication > Conference Paper
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