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CF₄ synthesis by fluorination of CF₂Cl₂ and CCl₄

Title
CF₄ synthesis by fluorination of CF₂Cl₂ and CCl₄
Authors
이윤우; 이경환; 임종성; 김재덕; 이윤용
Keywords
반도체용가스; 사불화메탄
Issue Date
1998-01
Publisher
Theories and Applications of Chem. Eng.
Citation
VOL 4, NO 1, 317-320
URI
https://pubs.kist.re.kr/handle/201004/19281
Appears in Collections:
KIST Publication > Conference Paper
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