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Effect of oxygen ion energy and annealing in formation of tin oxide thin films

Title
Effect of oxygen ion energy and annealing in formation of tin oxide thin films
Authors
송석균; 최원국; 정형진; 조준식; 최동수; 이정용; 백홍구; 고석근
Keywords
reactive ion-assited deposition
Issue Date
1997-04
Publisher
Japanese journal of applied physics, part 1.
Citation
VOL 36, NO 4A, 2281-2287
URI
https://pubs.kist.re.kr/handle/201004/19560
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KIST Publication > Article
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