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H2 gas-sensing characteristics of SnOx sensors fabricated by a reactive ion-assisted deposition with/without an activator layer

Title: H2 gas-sensing characteristics of SnOx sensors fabricated by a reactive ion-assisted deposition with/without an activator layer

Authors: 최원국; 송석균; 조준식; 윤영수; 최동수; 정형진; 고석근

Keywords: SnOx sensor; reactive ion-assisted deposition; ultra-thin metal activator

Issue Date: 1997-01

Publisher: Sensors and actuators. B, Chemical

Citation: VOL 40, 21-27

URI: https://pubs.kist.re.kr/handle/201004/19912

ISSN: 0925-4005

Appears in Collections:: KIST Publication > Article

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