Characteristics of SrBi2Ta2O9 thin films fabricated by the r.f. magnetron sputtering technique

Title
Characteristics of SrBi2Ta2O9 thin films fabricated by the r.f. magnetron sputtering technique
Authors
이전국송태권정형진
Keywords
SBTO; sputtering
Issue Date
1997-01
Publisher
Integrated ferroelectrics.
Citation
VOL 15, 115-125
URI
https://pubs.kist.re.kr/handle/201004/19951
Appears in Collections:
KIST Publication > Article
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