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Adhesion improvement between Au films and Si substrate by ion beam irradation

Title: Adhesion improvement between Au films and Si substrate by ion beam irradation

Authors: 고석근; 장홍규; K. H. Kim; S. Han; 최원국; 정형진

Issue Date: 1997-01

Publisher: Journal of vacuum science and technology A.

Citation: VOL 15, NO 4, 1-?

URI: https://pubs.kist.re.kr/handle/201004/19983

Appears in Collections:: KIST Publication > Conference Paper

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