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Low temperature polycrystalline silicon thin film transistor with silicon nitride ion stopper.

Title
Low temperature polycrystalline silicon thin film transistor with silicon nitride ion stopper.
Authors
이경하; 전영민; 차혁진; 장진
Issue Date
1996-06
Publisher
IEEE Electron Device Letters
Citation
v. 17, no. 6, 258-260
URI
https://pubs.kist.re.kr/handle/201004/20095
ISSN
0741-3106
Appears in Collections:
KIST Publication > Article
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