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A study on the film-formation mechanism by ionized cluster beam deposition.

Title
A study on the film-formation mechanism by ionized cluster beam deposition.
Authors
신치범; 이경호; 윤경석; 황경순; 문상흡; 조원일
Issue Date
1996-01
Publisher
공업화학
Citation
v. 7, no. 3, 464-472
URI
https://pubs.kist.re.kr/handle/201004/20555
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KIST Publication > Article
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