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Cross-sectional observation of NaClO stain-etched AlGaAs/GaAs multilayer by AFM.

Title
Cross-sectional observation of NaClO stain-etched AlGaAs/GaAs multilayer by AFM.
Authors
김용; 김희진; 김재성; 김무성; 민석기
Keywords
AFM
Issue Date
1995-02
Publisher
Journal of material science
Citation
v. 30, 678-?
URI
https://pubs.kist.re.kr/handle/201004/20689
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KIST Publication > Article
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