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Thermally-induced atomic mixing at the interface of Cu and polyimide

Title: Thermally-induced atomic mixing at the interface of Cu and polyimide

Authors: 고석근; 최원국; 송석균; Kook D. Pae; 정형진

Keywords: copper; polyimide; interface

Issue Date: 1994-01

Publisher: 한국진공학회지; Journal of the Korean Vacuum Society

Citation: VOL 3, NO 3, 316-321

URI: https://pubs.kist.re.kr/handle/201004/21094

ISSN: 1225-8822

Appears in Collections:: KIST Publication > Article

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