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Airflow velocity effect on particle deposition toward a horizontal wafer surface.

Title
Airflow velocity effect on particle deposition toward a horizontal wafer surface.
Authors
배귀남; 이춘식; 박승오
Keywords
particle deposition velocity; 입자침착속도; airflow velocity; 기류속도; thermophoresis; 열영동; horizontal wafer; 수평웨이퍼
Issue Date
1994-01
Publisher
대한기계학회 '94 년도 추계학술대회논문집 (II).
Citation
, 252-257
URI
https://pubs.kist.re.kr/handle/201004/21297
Appears in Collections:
KIST Publication > Conference Paper
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