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A study on the instability in PECVD-SiNx/InP structure utilizing capacatance and conductnace techniques.

Title
A study on the instability in PECVD-SiNx/InP structure utilizing capacatance and conductnace techniques.
Authors
강광남; 이정일; 한일기; 이명복
Keywords
PECVD
Issue Date
1991-01
Publisher
한국물리학회 학술발표회 , 전북대
Citation
, ?-?
URI
https://pubs.kist.re.kr/handle/201004/21849
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KIST Publication > Conference Paper
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