DSpace at KISTKIST PublicationArticle

Fabrication and characterization of miniature Si pressure sensor.

Title
Fabrication and characterization of miniature Si pressure sensor.
Authors
강광남; 이정일; 이명복; 주병권; 김형곤; 오명환
Keywords
pressure sensor
Issue Date
1990-11
Publisher
전자공학회논문지
Citation
v. 27, no. 11, 62-68
URI
https://pubs.kist.re.kr/handle/201004/21950
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Full Item Record


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE