RIE 로 처리된 GaAs 표면의 전기적 특성연구 .

Title
RIE 로 처리된 GaAs 표면의 전기적 특성연구 .
Authors
김성일한일기최원준이정일강광남조준환임한조이유종이명복
Keywords
MOCVD; GaAs; RIE
Issue Date
1990-01
Publisher
대한 전자공학회 추계 종합학술대회 논문집
Citation
v. 13, no. 2, 140-143
URI
https://pubs.kist.re.kr/handle/201004/21965
Appears in Collections:
KIST Publication > Conference Paper
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