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Compact 3-DOF mobile microrobot for mirco/nano manipulation system

Title
Compact 3-DOF mobile microrobot for mirco/nano manipulation system
Authors
김태성; 박정렬; 김덕호; 이교일
Keywords
impact actuating mechanism; nanopositioning; piezoelectric; modeling
Issue Date
2002-10
Publisher
Proceedings of the 2002 international conference on control, automation and system
URI
https://pubs.kist.re.kr/handle/201004/23544
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KIST Publication > Conference Paper
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