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Effect of substrate temperature on etched feature of thin chromium film and its application

Title: Effect of substrate temperature on etched feature of thin chromium film and its application

Authors: 서상원; 김훈; 박종원; 이윤희; 박공석; 정재훈; 장진; 김동호; 오명환; 김남수; 주병권; 김훈

Keywords: etched feature; thin chromium film; substrate temperature

Issue Date: 2000-11

Publisher: ISPSA 2000

Citation: , 197-197

URI: https://pubs.kist.re.kr/handle/201004/23877

Appears in Collections:: KIST Publication > Conference Paper

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