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Effect of sputtering input power on structural inhomegeneities in as-sputtered Fe-Hf-N thin films

Title
Effect of sputtering input power on structural inhomegeneities in as-sputtered Fe-Hf-N thin films
Authors
김기현; 김영호; 김종렬; 한석희; 김희중
Keywords
nanocrystalline
Issue Date
2000-01
Publisher
Journal of magnetism and magnetic materials
Citation
VOL 215-216, 368-371
URI
https://pubs.kist.re.kr/handle/201004/23917
ISSN
0304-8853
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KIST Publication > Article
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