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Insulating layer grown by PECVD for InP MISFET.

Title
Insulating layer grown by PECVD for InP MISFET.
Authors
강광남; 이정일; 최원준; 한일기; 이유종; 이명복; 조준환
Keywords
InP MISFET
Issue Date
1990-01
Publisher
'90 레이저 광기술 하계 Workshop 논문집
Citation
, 123-?
URI
https://pubs.kist.re.kr/handle/201004/24912
Appears in Collections:
KIST Publication > Conference Paper
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