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Surface smoothing and etching by gas cluster ion beam

Title
Surface smoothing and etching by gas cluster ion beam
Authors
송재훈; 최원국
Keywords
gas cluster; surface smoothing; etching; ITO; Si3N4
Issue Date
2003-10
Publisher
Application of Accelerators in Research and Industry: 17th Int'l. Conference
Citation
, 745-749
URI
https://pubs.kist.re.kr/handle/201004/25252
Appears in Collections:
KIST Publication > Conference Paper
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