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Ammonolysis of Ga2O3 and its application to the sublimation source for the growth of GaN film

Title: Ammonolysis of Ga2O3 and its application to the sublimation source for the growth of GaN film

Authors: 박용주; 오청식; 염태호; 유영문

Keywords: substrate; sublimation; ammonolysis; gallium oxide; nitrides; growth from vapor; semiconducting III-V materials

Issue Date: 2004-03

Publisher: Journal of Crystal Growth

Citation: VOL 264, 1-6

URI: https://pubs.kist.re.kr/handle/201004/25554

ISSN: 0022-0248

Appears in Collections:: KIST Publication > Article

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