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Growth kinetics of W5Si3 layer in WSi2/W system

Title
Growth kinetics of W5Si3 layer in WSi2/W system
Authors
이경환; 윤진국; 이종권; 도정만; 홍경태; 윤우영
Keywords
Growth kinetics; Diffusion and phase transformation; W-silicides; Tungsten
Issue Date
2004-09
Publisher
Surface and Coatings Technology
Citation
VOL 187, 146-153
URI
https://pubs.kist.re.kr/handle/201004/25744
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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