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Electrical properties of PZT-PCW thick film on Pt/SiC/Si, and structural stability of SiCas buffer layer

Title
Electrical properties of PZT-PCW thick film on Pt/SiC/Si, and structural stability of SiCas buffer layer
Authors
최기용; 최덕균; 박지연; 윤대성; 김태송
Keywords
SiC membrane; PZT-PCW; electrical property; structural stability
Issue Date
2004-04
Publisher
ISIF 2004
URI
https://pubs.kist.re.kr/handle/201004/26535
Appears in Collections:
KIST Publication > Conference Paper
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