DSpace at KIST: Investigation on Hydrogen Ion Implantation for Fabrication of GaAs-on-insulator (GOI) wafer for Optical Devices

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Investigation on Hydrogen Ion Implantation for Fabrication of GaAs-on-insulator (GOI) wafer for Optical Devices

Title: Investigation on Hydrogen Ion Implantation for Fabrication of GaAs-on-insulator (GOI) wafer for Optical Devices

Authors: 박종국; 신상원; 이종한; 송종한; 김선호; 박진우; 변영태

Keywords: 광소자; GOI 웨이퍼; 수소 이온 주입

Issue Date: 2005-11

Publisher: Photonics Conference 2005

Citation: , 187-188

URI: https://pubs.kist.re.kr/handle/201004/28276

Appears in Collections:: KIST Publication > Conference Paper

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