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Wafer direct bonding between InP and GGG(Gd3Ga5O12) using O2 plasma

Title
Wafer direct bonding between InP and GGG(Gd3Ga5O12) using O2 plasma
Authors
노종욱; 양정수; 옥성해; 이석; 우덕하; 변영태; 전영민; 이우영
Keywords
O2 플라즈마; GGG; InP; 웨이퍼 직접 접합
Issue Date
2005-11
Publisher
Photonics Conference 2005
Citation
, 191-192
URI
https://pubs.kist.re.kr/handle/201004/28277
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KIST Publication > Conference Paper
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