DSpace at KISTKIST PublicationConference Paper

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dc.contributor.author노종욱-
dc.contributor.author양정수-
dc.contributor.author옥성해-
dc.contributor.author이석-
dc.contributor.author우덕하-
dc.contributor.author변영태-
dc.contributor.author전영민-
dc.contributor.author이우영-
dc.date.accessioned2015-12-02T08:26:27Z-
dc.date.available2015-12-02T08:26:27Z-
dc.date.issued200511-
dc.identifier.citation, 191-192-
dc.identifier.other21930-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/28277-
dc.publisherPhotonics Conference 2005-
dc.subjectO2 플라즈마-
dc.subjectGGG-
dc.subjectInP-
dc.subject웨이퍼 직접 접합-
dc.titleWafer direct bonding between InP and GGG(Gd3Ga5O12) using O2 plasma-
dc.typeConference Paper-
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