A cyclic process for the nitridation of Si powder

Title
A cyclic process for the nitridation of Si powder
Authors
김민기박종구이해원강신후
Keywords
Si3N4; Cyclic reaction; Internal stress; Stress intensity factor
Issue Date
2005-11
Publisher
Materials science & engineering. A, Structural materials : properties, microstructure and processing
Citation
VOL 408, 85-91
URI
https://pubs.kist.re.kr/handle/201004/28346
ISSN
0921-5093
Appears in Collections:
KIST Publication > Article
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