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Electrical properties of PZT-PCW thick film on Pt/SiC/Si, and structural stability of SiC

Title
Electrical properties of PZT-PCW thick film on Pt/SiC/Si, and structural stability of SiC
Authors
최기용; 최덕균; 박지연; 윤대성; 김태송
Keywords
SiC; PZT; thick film
Issue Date
2005-04
Publisher
Integrated ferroelectrics
Citation
VOL 63, 93-101
URI
https://pubs.kist.re.kr/handle/201004/28510
ISSN
1058-4587
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KIST Publication > Article
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